Gemini 1 - Dual station Reactor S/N 078
Originally manufactured by Gemini Research
N and P dopant option
SiH2Cl2 and SiHl4 options
Very low hours
Reduced pressure option
3 port inject
Unit Instruments Flow Controllers
Excellent condition
Gemini 1 - Single station Reactor S/N 011
Originally manufactured by Gemini Research
N and P dopant option with 2 set points
Fully loaded gas panel SICl4, SiHCl3, SiH2Cl2, and SiH4 options
Two set points for mainstream gas
Less than 50 hours
Like new!
